Finishing characteristics of brittle materials by elidlap. Elid grinding is recommended for lowrigidity machine tools and lowrigidity workpieces. Several sets of experiments have been performed to determine the optimal grinding conditions. Igor makarenko, christian vogt, rolf rascher, peter sperber, and thomas stirner elid supported grinding of thin sapphire wafers. International journal of machine tools and manufacture. Elid grinding of sic ultra lightweight mirror hiroaki eto 1, yutang dai, noboru ebizuka, yasutaka saito, toru suzuki 1, weimin lin 1, hitoshi ohmori, toshikazu ebisuzaki, hideki takami2 1 riken the institute of physical and chemical research, 21, hrosawa, wako, saitama, 3150198, japan. The basic components of the process, machine tool, power supply, grinding wheel, electrode and electrolytes, have also undergone several. To grind sapphire the materials behavior is additionally to be considered. The numerical calculation results by fem agree with the results by elid grinding. The wheel wear mechanism in elid grinding of sapphire is dominated by bond fracture because the bond strength is reduced by electrolysis.
Electrolytic inprocess dressing elid is an efficient method to dress the grinding wheel while performing grinding. Pdf electrolytic inprocess dressing elid grinding for nano. A gist of the important research milestones on the process has been organized in this report. United grinding is your solutions partner, with products and services designed to assist you throughout the life cycle of your cnc grinding machine, including equipment sales, installation, training, applications support, preventive and predictive maintenance, parts and repair services. Elid grinding with lapping kinematics sciencedirect. Cast iron bonded grinding wheels are predominantly used for the elid grinding process because of their superior oxidising behaviour. Ultraprecision finishing process integrated elid grinding. A knowledge based feedback control system for precision elid grinding. An important feature of the elid grinding is that it can be retro.
Newer materials with excellent properties are of recent interest in the optical, electrical and electronics industries. The development and research of the special elid grinding. Elid dressing behaviour of fine grained bronze bonded. In addition, elid grinding of silicon wafers was done on a horizontal spindle surface grinding machine using a straight type wheel, as shown in fig. In conventional elid grinding, constant voltage is applied on the metalbonded diamond wheels to ensure constant protrusion of super fine cutting grits throughout the grinding cycle. The hybrid process of elid grinding has a simultaneous electrolytic reaction and grinding action. A study on the grinding of glass using electrolytic in. Elid grinding technology applied to difficulttomachine materials precision and ultraprecision processing has obtained good results.
Research on cylindrical precision machining adopting elid. Click download or read online button to get handbook of ceramic grinding and polishing book now. Elid grinding characteristics of glassceramic materials. Handbook of ceramic grinding and polishing download. In order to explore the new way to precision machining of the cylindrical, elid precision mirror grinding technology are employed to precision ultraprecision grinding experiments. Finishing of new materials for the required stringent specification stated by those industrial applications emerges the innovation.
This setup would make it possible to grind a large wafer without using a large grinding wheel. The oxides have an insulating effect and lower the current which. To fulfil this, several measures have been taken and preliminary experiments have been carried out to prove its feasibility. Sapphire material is, due to its crystal structure, difficult to machine in an economic way. Efficient dressing of the wheel in elid grinding by controllable.
Super abrasive diamond grinding wheels and elid are used to produce a mirror of 1m length with an average surface finish of less than 10 nm. Pdf development of an onmachine profile measurement system in elid grinding for machining aspheric surface with software compensation published version restricted to registered users only download 1mb request a copy. A grinding method which uses specific metallic bond fine grit wheels and electrolytic in process dressing elid is proposed for the effectual mirror surface. Elid grinding and edm for finish machining t saleh and r bahar, international islamic university malaysia, kuala lumpur, malaysia r 2016 elsevier inc. As prepolishing, in elid grinding, good surface quality may be obtained in high efficiency, and then, the last high form accuracy and surface roughness may be obtained by mrf. In this study, ceo2, sio2, fe2o3 and mgo soft abrasives are used in the design of soft. Author links open overlay panel shaohui yin a hitoshi ohmori b yutang dai c yoshihiro uehara b fengjun chen a hengning tang a.
In this paper, a fundamental study on the mechanism of the elid grinding technique is discussed in detail. Elid grinding, as prefinishing, was employed to obtain high efficiency and high surface quality. Elid grinding has been used in experiments with many materials including ceramics, glass, and biomedical materials. The silicon wafer workpiece was held on a rotary table. Elid supported grinding of thin sapphire wafers request pdf. Given elid precision mirror grinding technology has effectively solved the basis of many of the typical flatprecision machining difficult materials and efficient processing, through the conversion process equipment. An outer peripheral portion of the wheel 10 includes a conductive elastic member 11 and abrasion. An outer surface of the workpiece is subjected to elid grinding by using a conductive grinding wheel 4. Elid grinding with lapping kinematics produces no thermal damage or burn to either the grinding wheel or the workpiece due to the low speed of the operation. Elidgrinding of hardened steel for industrial applications. Read elid grinding characteristics of glassceramic materials, international journal of machine tools and manufacture on deepdyve, the largest online rental service for scholarly research with thousands of academic publications available at your fingertips. Elid fine grinding of sapphire rollers with emphasis on. A study on electrolytic inprocess dressing elid grinding of.
Elid grinding free download as powerpoint presentation. Finishing characteristics of brittle materials by elid lap grinding using metalresin bonded wheels. Pdf electrolytic inprocess dressing elid grinding and. In this study, the grinding experiments were conducted on sic particlereinforced aluminum matrix sicpal composites under wet, dry, cryogenic, and elid grinding conditions, and the effects of grinding depth and table speed on grinding forces and grinding force ratio were investigated.
A study on electrolytic inprocess dressing elid grinding of sapphire with acoustic emission. Click download or read online button to get handbook of ceramics grinding and polishing book now. Elid lap grinding was performed on brittle materials such as silicon and glass bk 7 with wheels of different grit sizes. Grinding force was less in elid grinding than in conventional grinding.
The grinding wheel profile obtained after truing using on machine truing shows an accuracy of 3 m. Electrolytic inprocess dressing elid grinding is a new method for achieving ultraprecision surface on. Proceedings of the asme 2009 international manufacturing science and engineering conference. Development of an onmachine profile measurement system in. Request pdf surface roughness characteristics of fine elid cross grinding for silicon wafers silicon is widely used as the most important substrate material in integrated circuit and micro. This site is like a library, use search box in the widget to get ebook that you want. Comparison of ground surfaces by polishing and elid lap grinding. Results indicate that the acoustic emission technique has the potential to be used for monitoring the elid grinding process, detecting the condition of the grinding wheel, and investigating the. Pdf elid grinding and edm for finish machining researchgate. Based on the existing experimental results of elid grinding, according to the structure characteristics of the existing grinding machine, we designed and developed a special elid grinding machine in order to greatly improve the machining precision and. It is a method of constant pressure grinding which employs the electrically conductive bonded wheel and electrolytic inprocess dressing elid. International journal of machine tools manufacture, 40 2000, pp.
The development of an expert system when elid grinding hard materials. Grinding force increased continuously during conventional grinding. The wheel wear mechanism in elid grinding of sapphire is dominated by bond. Application of elid grinding technique to precision. Surface roughness characteristics of fine elid cross. The grinding wheel is connected to the pole of the positive elid power supply fuji elider 921 through a brush contact at the wheel center. Pdf electrolytic inprocess dressing elid grinding for. The development of an expert system when elid grinding hard. A nanometreprecision, ultrastiff plezostepper stage for elid grinding. Asme 2009 international manufacturing science and engineering conference, volume 1. Elid lap grinding is an extension of the elid grinding technology. Elid system consists of a metalbonded diamond grinding wheel, an electrode, a power supply and an electrolyte. Elid electrolytic inprocess dressing grinding is a new ultraprecision machining technique which employs inprocess electrolysis to dress the metal bond diamond wheel in grinding process. The state of the passivating film is a key factor affecting elid grinding.
Handbook of ceramics grinding and polishing download. Electrolytic inprocess dressing elid grinding is a well established technology for achieving highest quality surface finish on hard and brittle materials such as optical glass, ceramics, and silicon compounds. The elid grinding process is the combination of an electrolytic process. The article, at first, focuses on the newly developed method for grinding of hard and brittle materials, called elid electrolytic in process. The outer part of the iron bonding is dissolved to form a passivating layer of oxides and hydroxides. The objective of this study is to design and evaluate soft abrasive wheels for silicon wafer grinding. Chapter 09158 elid grinding and edm for finish machining. Download as ppt, pdf, txt or read online from scribd. Advanced elid process development for grinding silicon.
Elid grinding grinding abrasive cutting machining scribd. Recent studies show that the combination of elid and edm. Elid supported grinding of thin sapphire wafers elid supported grinding of thin sapphire wafers makarenko, igor 20101006 00. Elid grinding principle in elid grinding a metallic grinding wheel maintains its sharpness through an electrolytic passivation process. Electrolytic inprocess dressing elid grinding for nanosurface generation chapter pdf available january 2014 with 2,553 reads how we measure reads. Elid grinding of sintered sic mirror is successfully carried out using ultraprecision rotary grinder, and high surface quality was obtained. Elid grinding, since its introduction over two decades ago, has helped in material removal of hard and difficulttocut engineering materials. In the paper the state of the passivating film on the grinding wheel surface was characterized by the loop current, the strategies actively controlling the film state, discontinuous inprocess electrolyzing and intermittent grinding were put forward, and the elid grinding tests under the conditions of actively. But, due to the very thin mirror, profile deformation occurred.
An optical glass sample is ground by using cast iron bond diamond wheel and elid technique. In this paper, the principle of elid grinding is introduced. Authors tursunbaev sarvar anvarovich, school of mechanical and electrical engineering, harbin institute of technology, china. Elid grinding favors high rates of material removal. Table 1 summarizes the type of machines that have been used for elid grinding of silicon wafers.941 587 447 875 960 662 460 615 1579 210 407 1413 1251 160 520 335 940 140 1242 1173 1319 32 106 143 1283 1275 975 300 1033 614 475